Titre du document / Document title

Effects of heat treatment on structure of amorphous CN_x thin films by pulsed laser deposition

Auteur(s) / Author(s)

AOI Yoshifumi ⁽¹⁾ ; ONO Kojiro ⁽¹⁾ ; SAKURADA Kunio ⁽¹⁾ ; KAMIJO Eiji ⁽¹⁾ ; SASAKI Muneo ⁽²⁾ ; SAKAYAMA Kunihiko ⁽²⁾ ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

⁽¹⁾ Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University, Seta, Otsu 520-2194, JAPON
⁽²⁾ Industrial Research Center of Shiga Prefecture, Ritto-cho, Kurita-gun, Shiga 520-3004, JAPON

Résumé / Abstract

Investigation of compositional and structural modifications induced by heat treatment of pulsed laser deposited amorphous CN_x (x ∼ 0.23) thin film has been carried out. Fourier transform infrared, Raman scattering, X-ray photoelectron spectroscopies were carried out to investigate compositional and structural properties of films. The heat treatment induces a nitrogen loss of the film. The N/C ratio decreased from 0.23 for the as-deposited film to 0.17 for the film heat treated at 800°C. N1s electron spectra showed nitrogen atoms bonded to sp³ hybridized carbon preferentially removed by heat treatment, although those bonded to sp² hybridized carbon were stable. Simultaneously, growth of graphitic domains, i.e. graphitization of the film by heat treatment was observed by Raman spectroscopy. The nitrogen loss and changes in bonding structure concerned with nitrogen atoms by heat treatment are caused by the graphitization of amorphous CN_x film induced by heat treatment.

Revue / Journal Title

Thin solid films   ISSN 0040-6090   CODEN THSFAP 

Source / Source

2001, vol. 389, n^o1-2, pp. 62-67 (24 ref.)

Langue / Language

Anglais

Editeur / Publisher

Elsevier, Lausanne, SUISSE  (1967) (Revue)

Mots-clés anglais / English Keywords

Experimental study ; Thin films ; Amorphous state ; Growth from vapor ; Laser ablation technique ; Pulsed lasers ; Carbon nitrides ; Heat treatments ; Chemical composition ; Amorphous state structure ; Infrared spectra ; Fourier transformation ; Raman spectra ; Photoelectron spectroscopy ; X radiation ; Chemical bonds ; Inorganic compounds ; Nitrides ;

Mots-clés français / French Keywords

Etude expérimentale ; Couche mince ; Etat amorphe ; Méthode phase vapeur ; Méthode ablation laser ; Laser pulsé ; Carbone nitrure ; Traitement thermique ; Composition chimique ; Structure état amorphe ; Spectre IR ; Transformation Fourier ; Spectre Raman ; Spectrométrie photoélectron ; Rayon X ; Liaison chimique ; CNx ; C N ; Composé minéral ; Nitrure ;

Mots-clés espagnols / Spanish Keywords

Método fase vapor ; Estructura estado amorfo ;

Localisation / Location

INIST-CNRS, Cote INIST : 13597, 35400009834319.0110