Titre du document / Document title
Particulate-contamination-free wafer-handling systems for gas, liquid and vacuum environments used in a 64 Mbyte dynamic random-access memory process
Auteur(s) / Author(s)
TOKISUE H. ;
INOUE H. ;
Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)
Hitachi Ltd, mechanical eng. res. lab., Tsuchiura, JAPON
Résumé / Abstract
Devices which establish particle-free wafer handling for gas, liquid and vacuum environments used in a 64 Mbyte dynamic random-access memory (DRAM) process were developed. A non-contact handler was developed as a handling device for use in a gas environment, such as air or nitrogen, which keeps wafers clean without touching them through the mutual action of gas suction and blow-out. Also, a non-contact gas levitation track was developed for use in a gas environment, which levitates, transfers and guides wafers without any contact using the fluid force of gas blow-out with a very low velocity. A liquid levitation transport track was developed for use in a liquid environment, which transports wafers without exposing them to atmosphere using the fluid forces of liquid jets
Revue / Journal Title
Wear
ISSN
0043-1648
CODEN WEARAH
Source / Source
1993, vol. 168, n
o 1-2 (3 ref.), pp. 115-120
Langue / Language
Anglais
Editeur / Publisher
Elsevier, Amsterdam, PAYS-BAS
(1958)
(Revue)
Mots-clés anglais / English Keywords
Manipulator ;
Levitation ;
Gases ;
Liquid ;
Vacuum ;
Electrostatics ;
Chuck ;
Automation ;
Contamination ;
Manufacturing process ;
Semiconductor materials ;
Mots-clés français / French Keywords
Manipulateur ;
Lévitation ;
Gaz ;
Liquide ;
Vide ;
Electrostatique ;
Mandrin ;
Automatisation ;
Contamination ;
Procédé fabrication ;
Semiconducteur ;
Mots-clés espagnols / Spanish Keywords
Manipulador ;
Levitación ;
Gas ;
Líquido ;
Vacío ;
Electroestática ;
Mandril ;
Automatización ;
Contaminación ;
Procedimiento fabricación ;
Semiconductor(material) ;
Localisation / Location
INIST-CNRS, Cote INIST : 8579, 35400004734340.0180
Nº notice refdoc (ud4) : 3787767
