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Titre du document / Document title

Improvement of ultrasonic atomizer method for deposition of gas-sensing film on QCM

Auteur(s) / Author(s)

WYSZYNSKI Bartosz ; GALVEZ Agustin Gutierrez ; NAKAMOTO Takamichi ;

Résumé / Abstract

We report on improved ultrasonic atomizer method of depositing the sensing films on quartz crystal microbalance (QCM) sensors. The main objectives of the present work were minimizing the sensor-to-sensor response variation, improving the sensing film stability, and reducing amount of materials used during coating (reducing time of coating). In order to achieve the goals, we have redesigned and refabricated large parts of the atomizer system reported previously. The main principle of the operation-deposition of the fine mist generated by the ultrasonic device remained unchanged. The largest modifications encompass introduction of the new, sealed deposition chamber, considerable reduction of the flow resistance, and control over the flow rates of the mist and air streams in the system. The paper reports the new configuration of the ultrasonic atomizer method, optimization of the atomizer system performance (deposition parameters) and the results of improved quality of sensors fabricated using the new system.

Revue / Journal Title

Sensors and actuators. B, Chemical    ISSN  0925-4005 

Source / Source

2007, vol. 127, no1, pp. 253-259 [7 page(s) (article)]

Langue / Language


Editeur / Publisher

Elsevier, Kidlington, ROYAUME-UNI  (1990) (Revue)

Mots-clés d'auteur / Author Keywords

Odor sensor


Odor recorder


Sensing film


Ultrasonic atomizer


Deposition method




Localisation / Location

INIST-CNRS, Cote INIST : 19425 B, 35400018365883.0390

Nº notice refdoc (ud4) : 20163437

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