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Titre du document / Document title

Mechanical properties of polymer thin film measured by the bulge test

Auteur(s) / Author(s)

HUANG C. K. (1) ; LOU W. M. (1) ; TSAI C. J. (1) ; WU Tung-Chuan (2) ; LIN Hung-Yi (2) ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

(1) Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, TAIWAN, PROVINCE DE CHINE
(2) Industrial Technology Research Institute, Mechanical Industry Research Laboratories, Hsinchu, TAIWAN, PROVINCE DE CHINE

Résumé / Abstract

The bulge test was used to measure the mechanical properties of polymer thin films with thickness in the range of 77 nm to 352 nm. The mechanical properties of polymeric thin films were extracted by comparing differences between curves of load vs. bulge height obtained from composite film configurations with and without the polymer layer. Both square and long rectangular windows were used to obtain the Poisson ratio and Young's Modulus. Composite film with 230 nm silicon nitride layer and 30 nm Al layer has a composite Poisson ratio of 0.29 and a Young's Modulus of 234+0.8 GPa. The Poisson ratio extracted for a 352 nm Poly(methyl methacrylate)-based thermoplastic polymeric thin film was 0.39. The Young's Modulus extracted for the 77 nm thick polymeric film is 4.9±0.8 GPa and for the 352 nm thick film is 5.8±0.2 GPa. In the thickness range investigated, no clear thickness dependence of the Young's modulus was observed using the Bulge test.

Revue / Journal Title

Thin solid films    ISSN  0040-6090   CODEN THSFAP 

Source / Source

2007, vol. 515, no18, pp. 7222-7226 [5 page(s) (article)] (22 ref.)

Langue / Language

Anglais

Editeur / Publisher

Elsevier, Amsterdam, PAYS-BAS  (1967) (Revue)

Mots-clés anglais / English Keywords

Silicon nitrides

;

Stress effects

;

Elastic properties

;

Thick films

;

Composite materials

;

Young modulus

;

Poisson ratio

;

Polymers

;

Composite film

;

Thin films

;

Polymer films

;

Mechanical properties

;

Mots-clés français / French Keywords

6860B

;

Silicium nitrure

;

Effet contrainte

;

Propriété élastique

;

Couche épaisse

;

Matériau composite

;

Module Young

;

Coefficient Poisson

;

Polymère

;

Film complexe

;

Couche mince

;

Film polymère

;

Propriété mécanique

;

Mots-clés espagnols / Spanish Keywords

Propiedad elástica

;

Película compleja

;

Mots-clés d'auteur / Author Keywords

62.20.Dc

;

Bulge test; Elastic properties; Polymers; Stress

;

Localisation / Location

INIST-CNRS, Cote INIST : 13597, 35400016232291.0290

Nº notice refdoc (ud4) : 18807189



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