Titre du document / Document title

Shape memory behavior of high temperature Ti-Ni-Pt thin films

Auteur(s) / Author(s)

PANDURANGA Mohanchandra K. ⁽¹⁾ ; SHIN Daniel D. ⁽¹⁾ ; CARMAN Gregory P. ⁽¹⁾ ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

⁽¹⁾ Mechanical and Aerospace Engineering Department, University of California at Los Angeles, Los Angeles, California 90095-1597, ETATS-UNIS

Résumé / Abstract

Titanium-nickel-platinum (Ti₅₄Ni₂₆Pt₂₀) thin films shape memory alloys are produced using direct current magnetron sputtering process. The films are deposited on a (100) silicon substrate with 500 nm of wet thermal oxide layer. As-deposited amorphous films are crystallized at 550 °C and 600 °C for 1 h. X-ray diffraction shows that the structure of the martensitic phase is orthorhombic (B19). Both films exhibit classic shape memory effect. The transformation temperatures for the films are above 300 °C, the film annealed at 600 °C has higher transformation temperatures which are attributed to the presence of large precipitates not found in the film annealed at 550 °C.

Revue / Journal Title

Thin solid films   ISSN 0040-6090   CODEN THSFAP 

Source / Source

2006, vol. 515, n^o4, pp. 1938-1941 [4 page(s) (article)] (15 ref.)

Langue / Language

Anglais

Editeur / Publisher

Elsevier, Lausanne, SUISSE  (1967) (Revue)

Mots-clés anglais / English Keywords

Amorphous thin film ; Shape memory alloy ; Platinum ; Nickel ; Titanium ; Transmission electron microscopy ; Precipitates ; Orthorhombic lattices ; XRD ; Oxide layer ; Cathode sputtering ; Martensitic transformations ; Thin films ; Memory ;

Mots-clés français / French Keywords

Couche mince amorphe ; 6110N ; 6150K ; Substrat Si ; Pt ; Ni ; Ti ; Alliage mémoire forme ; Platine ; Nickel ; Titane ; Microscopie électronique transmission ; Précipité ; Réseau orthorhombique ; Diffraction RX ; Couche oxyde ; Pulvérisation cathodique ; Transformation martensitique ; Couche mince ; Mémoire ;

Mots-clés espagnols / Spanish Keywords

Aleación memoria forma ; Capa óxido ; Memoria ;

Mots-clés d'auteur / Author Keywords

Shape memory ; Titanim nickel platinum films ; Sputtering ; Transmission electron microscopy ; X-ray diffraction ;

Localisation / Location

INIST-CNRS, Cote INIST : 13597, 35400015957898.1140