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Titre du document / Document title

Acoustic picoliter droplets for emerging applications in semiconductor industry and biotechnology

Auteur(s) / Author(s)

DEMIRCI Utkan (1) ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

(1) E. L. Ginzton Laboratory, Stanford University, Stanford, CA 94305, ETATS-UNIS

Résumé / Abstract

This paper presents the theory of operation, fabrication, and experimental results obtained with a new acoustically actuated two-dimensional (2-D) micromachined microdroplet ejector array. Direct droplet based deposition of chemicals used in IC manufacturing such as photoresist and other spin-on materials, low-k and high-k dielectrics by ejector arrays is demonstrated to reduce waste contributing to environmentally benign fabrication and lower production cost. These ejectors are chemically compatible with the materials used in IC manufacturing and do not harm fluids that are heat or pressure sensitive. A focused acoustic beam overcomes the surface tension and releases droplets in air in every actuation cycle. The ejectors were operated most efficiently at 34.7 MHz and generated 28 μm diameter droplets in drop-on-demand and continuous modes of operation as predicted by the finite element analysis (FEA). Photoresist, water, isopropanol, ethyl alcohol, and acetone were ejected from a 4 x 4 2-D micromachined ejector array. Single photoresist droplets were printed onto a silicon wafer by drop-on-demand and continuous modes of operation. Parallel photoresist lines were drawn and a 4-in wafer was coated by Shipley 3612 photoresist by using acoustically actuated 2-D micromachined microdroplet ejector arrays.

Revue / Journal Title

Journal of microelectromechanical systems    ISSN  1057-7157 

Source / Source

2006, vol. 15, no4, pp. 957-966 [10 page(s) (article)] (17 ref.)

Langue / Language

Anglais

Editeur / Publisher

Institute of Electrical and Electronics Engineers, New York, NY, ETATS-UNIS  (1992) (Revue)

Mots-clés anglais / English Keywords

Screen printing

;

Experimental study

;

Finite element method

;

Modelling

;

Drops

;

Surface tension

;

Microelectronic fabrication

;

Dielectric materials

;

Photoresists

;

Chemical deposition

;

Ejector

;

Semiconductor materials

;

Droplets

;

Microfluidics

;

Fluidics

;

Acoustic transducers

;

Biotechnology

;

Microelectromechanical device

;

Mots-clés français / French Keywords

Sérigraphie

;

Etude expérimentale

;

Méthode élément fini

;

Modélisation

;

Goutte

;

Tension superficielle

;

Fabrication microélectronique

;

Diélectrique

;

Photorésist

;

Dépôt chimique

;

Ejecteur

;

Semiconducteur

;

Gouttelette

;

Microfluidique

;

Fluidique

;

Transducteur acoustique

;

Biotechnologie

;

Dispositif microélectromécanique

;

Mots-clés espagnols / Spanish Keywords

Fabricación microeléctrica

;

Dieléctrico

;

Depósito químico

;

Eyector

;

Dispositivo microelectromecánico

;

Mots-clés d'auteur / Author Keywords

Acoustic radiation pressure

;

deposition

;

droplet ejection

;

finite element analysis (FEA)

;

inkjet

;

microfluidic channels

;

Localisation / Location

INIST-CNRS, Cote INIST : 22521, 35400013342887.0260

Nº notice refdoc (ud4) : 18014205



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