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Titre du document / Document title

Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride

Auteur(s) / Author(s)

ROBSON J. I. (1) ; GOHAR L. K. (1) ; HURLEY M. D. (2) ; SHINE K. P. (1) ; WALLINGTON T. J. (2) ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

(1) Department of Meteorology, University of Reading, Reading, ROYAUME-UNI
(2) Physical and Environmental Sciences Department, Ford Motor Company, Dearborn, Michigan, ETATS-UNIS

Résumé / Abstract

Nitrogen trifluoride (NF3) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF3. Laboratory measurements give an integrated absorption cross section of 7.04 x 10-17 cm2 molecules-1 cm-1 over the spectral region 200-2000 cm-1. The radiative efficiency is calculated to be 0.21 Wm-2 ppbv-1 and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross-sections reported here.

Revue / Journal Title

Geophysical research letters    ISSN  0094-8276   CODEN GPRLAJ 

Source / Source

2006, vol. 33, no10, [Note(s): L10817.1-L10817.3] (13 ref.)

Langue / Language

Anglais

Editeur / Publisher

American Geophysical Union, Washington, DC, ETATS-UNIS  (1974) (Revue)

Mots-clés anglais / English Keywords

Carbon dioxide

;

carbon dioxide

;

Cross section (collision)

;

cross sections

;

Infrared absorption

;

Laboratory measurement

;

planning

;

greenhouse gas

;

Plasma

;

industry

;

Semiconductor materials

;

nitrogen

;

Global warming potential

;

efficiency

;

infrared spectra

;

Mots-clés français / French Keywords

Carbone dioxyde

;

Dioxyde carbone

;

Section efficace

;

Coupe transversale

;

Absorption IR

;

Mesure au laboratoire

;

Planification

;

Gaz effet serre

;

Plasma

;

Industrie

;

Semiconducteur

;

Azote

;

Potentiel réchauffement global

;

Efficacité

;

Spectre IR

;

Mots-clés espagnols / Spanish Keywords

Carbono dióxido

;

Sección eficaz

;

Absorción IR

;

Medida en laboratorio

;

Planificación

;

Plasma

;

Industria

;

Semiconductor(material)

;

Nitrógeno

;

Potencial calefacción global

;

Localisation / Location

INIST-CNRS, Cote INIST : 16687, 35400011565562.0560

Nº notice refdoc (ud4) : 17893800



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