Titre du document / Document title
Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride
Auteur(s) / Author(s)
ROBSON J. I. (1) ;
GOHAR L. K. (1) ;
HURLEY M. D. (2) ;
SHINE K. P. (1) ;
WALLINGTON T. J. (2) ;
Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)
(1) Department of Meteorology, University of Reading, Reading, ROYAUME-UNI
(2) Physical and Environmental Sciences Department, Ford Motor Company, Dearborn, Michigan, ETATS-UNIS
Résumé / Abstract
Nitrogen trifluoride (NF
3) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF
3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF
3. Laboratory measurements give an integrated absorption cross section of 7.04 x 10
-17 cm
2 molecules
-1 cm
-1 over the spectral region 200-2000 cm
-1. The radiative efficiency is calculated to be 0.21 Wm
-2 ppbv
-1 and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross-sections reported here.
Revue / Journal Title
Geophysical research letters
ISSN
0094-8276
CODEN GPRLAJ
Source / Source
2006, vol. 33, n
o10, [Note(s): L10817.1-L10817.3] (13 ref.)
Langue / Language
Anglais
Editeur / Publisher
American Geophysical Union, Washington, DC, ETATS-UNIS
(1974)
(Revue)
Mots-clés anglais / English Keywords
;
;
;
;
;
;
;
;
;
;
;
;
;
;
;
Mots-clés français / French Keywords
;
;
;
;
;
;
;
;
;
;
;
;
;
;
;
Mots-clés espagnols / Spanish Keywords
;
;
;
;
;
;
;
;
;
;
Localisation / Location
INIST-CNRS, Cote INIST : 16687, 35400011565562.0560
Nº notice refdoc (ud4) : 17893800
