Titre du document / Document title

Modified Structure zone Model to describe the morphological evolution of ZnO thin films deposited by reactive sputtering

Auteur(s) / Author(s)

MIRICA Eugenia ⁽¹⁾ ; KOWACH Glen ⁽²⁾ ; DU Henry ⁽¹⁾ ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

⁽¹⁾ Department of Chemical, Biochemical and Materials Engineering, Stevens Institute of Technology, Hoboken, New Jersey 07030, ETATS-UNIS
⁽²⁾ Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974, ETATS-UNIS

Résumé / Abstract

The morphological evolution of zinc oxide (ZnO) thin films deposited by magnetron sputtering is described by the use of a Structure Zone Model. A modified Structure Zone Model was revealed, in which the boundaries between zones with specific features are shifted toward lower homologous temperatures (T/T_m) than in the classical models. The range of homologous temperatures for this study were 0.13<T/T_m<0.43. The promotion of the formation of high temperature structures at relatively low temperatures is a consequence of the energetic species generated during the sputtering process that bombard the growing film. The reduction of the shadowing effect, along with the substrate heating that increases the surface diffusion, led to the suppression of zone T. Two new subzones of zone II were identified, IIa and IIb. The film in subzone IIa displays pronounced faceting. The film in subzone IIb has a characteristic smooth surface due to enhanced surface diffusion at higher substrate temperatures during deposition, although pitted due to still incomplete surface diffusion.

Revue / Journal Title

Crystal growth & design   ISSN 1528-7483 

Source / Source

2004, vol. 4, n^o1, pp. 157-159 [3 page(s) (article)] (10 ref.)

Langue / Language

Anglais

Editeur / Publisher

American Chemical Society, Washington,DC, ETATS-UNIS  (2001) (Revue)

Mots-clés anglais / English Keywords

Transition element compounds ; Inorganic compounds ; Structure zone model ; Thin films ; Binary compounds ; Zinc oxides ; Surface diffusion ; Magnetrons ; Reactive sputtering ; Crystal growth from vapors ; Morphology ; Structural models ; Experimental study ;

Mots-clés français / French Keywords

Métal transition composé ; Composé minéral ; Modèle structure zone ; Substrat Pt ; O Zn ; ZnO ; Couche mince ; Composé binaire ; Zinc oxyde ; Diffusion superficielle ; Magnétron ; Pulvérisation réactive ; Croissance cristalline en phase vapeur ; Morphologie ; Modèle structure ; Etude expérimentale ;

Localisation / Location

INIST-CNRS, Cote INIST : 27261, 35400011165934.0280