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Titre du document / Document title

Electrodeposition of copper: the nucleation mechanisms

Auteur(s) / Author(s)

GRUJICIC Darko (1) ; PESIC Batric (1) ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

(1) Department of Materials, Mining and Metallurgical Engineering and Geology, University of Idaho, McClure Hall, Moscow, ID 83844-3024, ETATS-UNIS

Résumé / Abstract

The nucleation mechanisms of copper during electrodeposition of thin films from sulfate solutions were studied by utilizing the electrochemical techniques (cyclic voltammetry and chronoamperometry) and atomic force microscopy (AFM). Near atomically smooth glassy carbon was used as the deposition substrate (electrode). The copper nucleation mechanisms were examined as a function of solution pH, copper concentration. deposition potential. temperature, and background electrolyte. It was found that with pH and copper concentration increase, the nuclei size increased, while the nuclei population density decreased. An increase of deposition potential produced smaller nuclei and higher nuclei population density. Temperature affected the morphology of deposited copper. The presence of background electrolyte also influenced the morphology and population density of copper nuclei. The nucleation mechanisms were examined by fitting the experimental data (chronoamperometry) into the Scharifker Hills nucleation models. It was found that at pH 1, in the absence of background electrolyte, copper nucleation was instantaneous. At pH 2 and 3, the mechanism was inconclusive. In the presence of background electrolyte, the mechanism at pH I and 2 was mixed, while at pH 3, the mechanism was progressive nucleation.

Revue / Journal Title

Electrochimica acta    ISSN  0013-4686   CODEN ELCAAV 

Source / Source

2002, vol. 47, no18, pp. 2901-2912 (15 ref.)

Langue / Language

Anglais

Editeur / Publisher

Elsevier, Kidlington, ROYAUME-UNI  (1959) (Revue)

Mots-clés anglais / English Keywords

Chronoamperometry

;

Kinetics

;

Nucleation

;

Mechanism

;

Atomic force microscopy

;

Voltage

;

Operating conditions

;

Temperature effect

;

Concentration effect

;

pH

;

Medium effect

;

Copper Sulfates

;

Glassy state

;

Carbon

;

Electrodes

;

Electrochemical reaction

;

Copper

;

Electrodeposition

;

Experimental study

;

Mots-clés français / French Keywords

Chronoampérométrie

;

Cinétique

;

Nucléation

;

Mécanisme

;

Microscopie force atomique

;

Tension électrique

;

Condition opératoire

;

Effet température

;

Effet concentration

;

pH

;

Effet milieu

;

Cuivre Sulfate

;

Etat vitreux

;

Carbone

;

Electrode

;

Réaction électrochimique

;

Cuivre

;

Dépôt électrolytique

;

Etude expérimentale

;

Mots-clés espagnols / Spanish Keywords

Cronoamperimetría

;

Cinética

;

Nucleación

;

Mecanismo

;

Microscopía fuerza atómica

;

Voltaje

;

Condición operatoria

;

Efecto temperatura

;

Efecto concentración

;

pH

;

Efecto medio

;

Cobre Sulfato

;

Estado vitreo

;

Carbono

;

Electrodo

;

Reacción electroquímica

;

Cobre

;

Depósito electrolítico

;

Estudio experimental

;

Localisation / Location

INIST-CNRS, Cote INIST : 1516, 35400010432277.0040

Nº notice refdoc (ud4) : 13763760



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