Titre du document / Document title

A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS)

Auteur(s) / Author(s)

ENIKOV E. T. ⁽¹⁾ ; BOYD J. G. ⁽¹⁾ ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

⁽¹⁾ Department of Mechanical Engineering (MIC 251), The University of Illinois at Chicago, 842 West Taylor Street, Chicago, IL 60607, ETATS-UNIS

Résumé / Abstract

An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. Global integral equations are written for the conservation of mass, momentum, and energy, Maxwell's equations, and the second law of thermodynamics. The global equations are then localized in the volume, the material surfaces, and the nonmaterial bond line. The second law is used to determine the thermodynamic conjugates in the thermodynamic potential and the dissipation inequality. It is demonstrated that the jump in the Poynting vector across a surface is equal to the surface Joule heating due to surface electric conduction currents.

Revue / Journal Title

International journal of engineering science   ISSN 0020-7225   CODEN IJESAN 

Source / Source

2000, vol. 38, n^o2, pp. 135-158 (18 ref.)

Langue / Language

Anglais

Editeur / Publisher

Elsevier, Oxford, ROYAUME-UNI  (1963) (Revue)

Mots-clés anglais / English Keywords

Microstructure ; Electromechanical system ; Thermodynamic theory ; Integral equations ; Momentum ; Maxwell equations ; Poynting vector ; Joule heating ; Charge conservation ; Angular momentum ; Energy conservation ; Constitutive equation ; Temperature distribution ;

Mots-clés français / French Keywords

Microstructure ; Système électromécanique ; Théorie thermodynamique ; Equation intégrale ; Quantité mouvement ; Equation Maxwell ; Vecteur Poynting ; Effet Joule ; Conservation charge ; Moment cinétique ; Conservation énergie ; Equation constitutive ; Champ température ; Anodic bonding ;

Mots-clés espagnols / Spanish Keywords

Sistema electromecánico ; Teoría termodinámica ; Vector Poynting ; Ecuación constitutiva ;

Localisation / Location

INIST-CNRS, Cote INIST : 10407, 35400008101991.0020